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top SF6/N2/CF4 gas mixtures EGYPT

top SF6/N2/CF4 gas mixtures EGYPT

SF6/N2/CF4 gas mixtures Vacuum ChargingSF6/N2/CF4 gas mixtures Vacuum Charging .. Aug 01, 2014 The working gases were inserted through a shower distributor located at the top end of the reactor. In this study were used the fluorinated gases SF 6 (purity = 99.99%) and CF 4 (purity = 99.99%), that were mixed together or separately with O 2 (99.99%), keeping the total gas flow at.

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